SCAN CT

Cyber Non-contact Profilometer

雷科股份有限公司

SEMI/PCB Measurement - Precision Inspection, Quality Control

SEMI/PCB Measurement - Precision Inspection, Quality Control
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SCAN CT

Cyber Non-contact Profilometer

SCAN CT
SCAN CT

  • Easy-to-Use Interface
  • Complete 2D and 3D Analysis
  • Multi-Sensor Support
  • Fast Measurement Definition
  • Height and Intensity data

Product Description

Other Product Description

2D PROFILE MEASUREMENT(1) 2D PROFILE MEASUREMENT(1)
  • Step Height (avg., max. and min. height)
  • Flatness and Warpage
  • Width and Length
  • Cross Section Area
  • Angle, Radius, Contour Analysis
2D PROFILE MEASUREMENT(2) 2D PROFILE MEASUREMENT(2)
  • Define base line and measurement areas using reference and measurement cursors. Select analysis from dropdown menu.
3D COPLANARITY MEASUREMENT(1) 3D COPLANARITY MEASUREMENT(1)
  • 3D Height (avg., max. and min. height)
  • Flatness and Warpage
  • Coplanarity
3D COPLANARITY MEASUREMENT(2) 3D COPLANARITY MEASUREMENT(2)
  • Draw rectangle, round or polygon cursors to define base plane and measurement areas.
3D ROUGHNESS MEASUREMENTS(1) 3D ROUGHNESS MEASUREMENTS(1)
  • New DIN EN ISO 25178 Parameters
  • 3D Waviness Filters
  • 3D Abbott-Firestone material curve, Histogram
3D ROUGHNESS MEASUREMENTS(2) 3D ROUGHNESS MEASUREMENTS(2)
  • Use advanced DIN /TS 16610 Filters. 3D Roughness Analysis even on warped or uneven surfaces.
PARALLEL DATA COLLECTION(1) PARALLEL DATA COLLECTION(1)
  • Parallel scanning with up to 4 sensors
  • Collect Top, Bottom and Thickness data
  • Average Thickness, Bow and Curvature
  • Total Thickness Variation
  • Parallel Intensity Masking
PARALLEL DATA COLLECTION(2) PARALLEL DATA COLLECTION(2)
  • Graphical display of thickness maps and top/bottom surfaces.
PROFILE ROUGHNESS MEASUREMENTS(1) PROFILE ROUGHNESS MEASUREMENTS(1)
  • DIN EN ISO conform Roughness Parameters
  • Shape Removal Algorithm
  • Abbott-Firestone Material Curve
  • Histogram
  • Tip Simulation for Non-Contact Systems
PROFILE ROUGHNESS MEASUREMENTS(2) PROFILE ROUGHNESS MEASUREMENTS(2)
  • Advanced roughness analysis, even on round or angled surfaces using shape compensation. Display waviness and roughness profile.
3D VOLUME & AREA MEASUREMENTS(1) 3D VOLUME & AREA MEASUREMENTS(1)
  • Volume (Cuts, Fills, Net Volume)
  • Planar area
  • Surface area
3D VOLUME & AREA MEASUREMENTS(2) 3D VOLUME & AREA MEASUREMENTS(2)
  • Measures cuts and fills and uses height threshold. Accurate areal and planar surface calculations.
2D/3D SURFACE COMPENSATION(1) 2D/3D SURFACE COMPENSATION(1)
  • 2D and 3D Polynom Fit
  • Pre- and after measurements
  • Areal Waviness Compensation
2D/3D SURFACE COMPENSATION(2) 2D/3D SURFACE COMPENSATION(2)
  • Surface compensation is only applied based on the data in the reference cursors.
MORE FEATURES AND HIGHLIGHTS(1) MORE FEATURES AND HIGHLIGHTS(1)
  • x-, y-, z-data stitching capability
  • 2D and 3D etch detection algorithm
  • 3D surface matching
  • Raster up to 400,000,000 data points
  • Integrated user management
MORE FEATURES AND HIGHLIGHTS(2) MORE FEATURES AND HIGHLIGHTS(2)
  • Compare geometry by overlaying profiles.
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